Product ····

Product overview

Product name　　　　　  : AR-S300H-300 (Arm: 165mm)
Product name 　　　　　 : AR-S300H-300L (Arm: 200mm)
Applicable Environment     : Cleanroom
Transported Items                 : 300 mm Silicon wafer

Feature

• Single‑arm robot for transporting wafers in cleanroom environments.
• Z‑axis provides a 300mm of travel..
• Equipped with absolute‑encoder AC servo motors.
• Supports multiple wafer‑handling methods, including vacuum suction, clamping, and non‑contact adsorption.
• Optional flipping axis is available.
• Includes a dedicated controller optimized for wafer handling, enabling efficient operation using a wide range of built‑in commands without complex programming.
• Origin positions, strokes, and mechanical stopper positions can be preconfigured according to the equipment layout, ensuring easy integration and setup.

Customization Options

• Designed in compliance with various safety standards, enabling configurations that meet required safety criteria.
• Custom transport hands can be manufactured according to customer requirements, ensuring optimal handling performance.
• Robot mounting flanges and hand‑mounting brackets can be modified to match the equipment layout.
• Compatible with battery‑less absolute encoders.
• Available with optional origin‑sensor specifications.
• Robot linear travel axes can also be integrated and controlled as robot axes.