Product ····
製品紹介
Semiconductor Transfer Robot
Vacuum transport
AR-WV350B
Specifications
Robot
Products
AR-WV350B-150
Arm
2
Operating range
Maximum reach : 405mm (to wrist joint center)
Rotation. : +185/-145deg
Up/Down. : 150mm
Rotation. : +185/-145deg
Up/Down. : 150mm
Transported items
300 mm Silicon wafer, etc.
Supported vacuum level
1.0×10-5Pa
Robot
Products
AR-WV350B-150L
Arm
2
Operating range
Maximum reach : 530mm (to wrist joint center)
Rotation. : +185/-145deg
Up/Down. : 150mm
Rotation. : +185/-145deg
Up/Down. : 150mm
Transported items
300 mm Silicon wafer, etc.
Supported vacuum level
1.0×10-5Pa
Product overview
Product name : AR-WV350B-150 (Arm: 170mm)
Product name : AR-WV350B-150L (Arm: 240mm)
Applicable Environment : Vacuum, Nitrogen, etc.
Transported Items : 300 mm Silicon wafer
Feature
- Double‑arm robot designed for transferring wafers in vacuum environments.
- Long Z‑axis stroke provides a 150 mm of travel.
- Vacuum seal uses a specially engineered mechanical seal that ensures stable performance under temperature and pressure fluctuations.
- Equipped with absolute‑encoder AC servo motors.
- Features a dedicated controller optimized for wafer handling, enabling efficient operation using a wide range of built‑in commands without complex programming.
- Origin positions, strokes, and mechanical stopper positions can be preconfigured according to the equipment layout, ensuring easy integration and setup.
Customization Options
- Designed in compliance with various safety standards, allowing configurations that meet required safety criteria.
- Custom transport hands can be manufactured according to customer requirements to achieve optimal handling performance.
- Robot mounting flanges and hand‑mounting brackets can be modified to match the equipment layout.
- Compatible with battery‑less absolute encoders.
