Product ····

Product overview

Product name　　　　　  : AR-SV350B-150 (Arm: 170mm)
Product name 　　　　　 : AR-SV350B-150L (Arm: 240mm)
Applicable Environment     : Vacuum, Nitrogen, etc.
Transported Items                 : 300 mm Silicon wafer

Feature

• Single‑arm robot designed for transferring wafers in vacuum environments.
• Long Z‑axis stroke provides a150 mm of travel.
• Vacuum seal uses a specially engineered mechanical seal that ensures stable performance under temperature and pressure fluctuations.
• Equipped with absolute‑encoder AC servo motors.
• Features a dedicated controller optimized for wafer handling, enabling efficient operation using built‑in commands without complex programming.
• Origin positions, strokes, and mechanical stopper positions can be preconfigured according to the equipment layout, ensuring easy integration and setup.

Customization Options

• Specifications compliant with various safety standards can be supported, enabling designs that meet the required safety regulations.
• Custom transfer hands can be manufactured according to customer requirements to achieve optimal handling performance.
• Support for battery‑less absolute encoders is also available.