Product ····

Product overview

Product name　　　　　  : AR-WV5S-350 (Arm: 850mm)
Product name 　　　　　 : AR-WV6S-450 (Arm: 950mm)
Applicable Environment     : Vacuum, Nitrogen, etc.
Transported Items                 : 5G glass substrates

Feature

• Single‑arm robot designed for transporting FPD glass in vacuum environments.
• Long Z‑axis stroke enables an operating range of 350mm to 400mm.
• Vacuum seal uses a specially engineered mechanical seal that maintains stable performance against temperature and pressure fluctuations.
• Vacuum‑side arm adopts a steel‑belt drive, providing low outgassing and low vibration.
• Various sensors can be routed through the arm and integrated into the end‑effector.
• Equipped with absolute‑encoder AC servo motors.
• Controller is optimized for glass handling, enabling efficient operation using a wide range of built‑in commands without complex programming.
• Origin positions, strokes, and mechanical stopper positions can be preconfigured according to the equipment layout, ensuring easy integration and setup.

Customization Options

• Designed in compliance with various safety standards, allowing configurations that meet required safety criteria.
• Custom transport hands can be manufactured according to customer requirements to achieve optimal handling performance.
• Robot mounting flanges and hand‑mounting brackets can be modified to match the equipment layout.